The RD8-WL (WL26 and WL48) wafer mapping system series is available in standard and custom configurations for mapping materials of all sizes and shapes up to 200x200mm. Compared to the RD8 model, the WL series features robotic clean robot wafer handling for batch measurement. The robotic models include 4 to 8 inch and 2 to 6 inch configurations. Standard measurements include photoluminescence, epitaxial layer thickness, wafer curvature measurement, transmission and/or reflection, back-side illumation phosphor material analysis and full wafer thickness.
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